ARTICLE
2025 Vol 1 · No 4
UZ 095c2177e150
KREMNIY VA POLIKREMNIYDAGI PIEZOQARSHILIKLIKNI MODELLASHTIRISH
MODELING OF PIEZORESISTANCE IN SILICON AND POLYSILICON | МОДЕЛИРОВАНИЕ ПЬЕЗОСОПРОТИВЛЕНИЯ В КРЕМНИИ И ПОЛИСИЛИКОНЕ
Partner conferences of the International Scientific Journal Research Focus, 1(4), 827–830
Аннотация
Yarimo‘tkazgichli materiallar fizikasi sohasida piezoqarshilik effekt muhim ahamiyat kasb etadi, ayniqsa kremniy va polikristall kremniy kabi moddalar asosida sensorlar ishlab chiqishda. Piezoqarshilik — bu materialning elektr qarshiligining tashqi mexanik kuchlanishga bog‘liq holda o‘zgarish xossasidir. Piezoqarshilik sensorlar nafaqat mikromexanik tizimlarda (MEMS), balki avtomatlashtirish, kosmik va biotibbiyot sohalarida keng qo‘llaniladi.
Ключевые слова
PiezoqarshilikMEMSkristallografikharakatchanlikpiezorezistiv koeffitsiyentlar matritsasikuchlanish tenzori
Как цитировать
A.X. Suvanov; J.R. Nematullayev (2025). KREMNIY VA POLIKREMNIYDAGI PIEZOQARSHILIKLIKNI MODELLASHTIRISH. Partner conferences of the International Scientific Journal Research Focus, 1(4), 827–830. https://doi.org/10.66073/ReFocus-Conf/519