KREMNIY VA POLIKREMNIYDAGI PIEZOQARSHILIKLIKNI MODELLASHTIRISH

A.X. Suvanov; J.R. Nematullayev

doi:10.66073/ReFocus-Conf/519

ARTICLE 2025 Vol 1 · No 4 UZ 095c2177e150

KREMNIY VA POLIKREMNIYDAGI PIEZOQARSHILIKLIKNI MODELLASHTIRISH

MODELING OF PIEZORESISTANCE IN SILICON AND POLYSILICON | МОДЕЛИРОВАНИЕ ПЬЕЗОСОПРОТИВЛЕНИЯ В КРЕМНИИ И ПОЛИСИЛИКОНЕ

A.X. Suvanov Namangan davlat texnika universiteti tayanch doktorantlari
J.R. Nematullayev

Partner conferences of the International Scientific Journal Research Focus, 1(4), 827–830

Full text (PDF) 451 KB DOI Publisher page

Abstract

Yarimo‘tkazgichli materiallar fizikasi sohasida piezoqarshilik effekt muhim ahamiyat kasb etadi, ayniqsa kremniy va polikristall kremniy kabi moddalar asosida sensorlar ishlab chiqishda. Piezoqarshilik — bu materialning elektr qarshiligining tashqi mexanik kuchlanishga bog‘liq holda o‘zgarish xossasidir. Piezoqarshilik sensorlar nafaqat mikromexanik tizimlarda (MEMS), balki avtomatlashtirish, kosmik va biotibbiyot sohalarida keng qo‘llaniladi.

Keywords

Piezoqarshilik MEMS kristallografik harakatchanlik piezorezistiv koeffitsiyentlar matritsasi kuchlanish tenzori

How to cite

A.X. Suvanov; J.R. Nematullayev (2025). KREMNIY VA POLIKREMNIYDAGI PIEZOQARSHILIKLIKNI MODELLASHTIRISH. Partner conferences of the International Scientific Journal Research Focus, 1(4), 827–830. https://doi.org/10.66073/ReFocus-Conf/519

Identifier: https://rf-library.uz/article/095c2177e150/kremniy-va-polikremniydagi-piezoqarshiliklikni-modellashtirish
DOI: 10.66073/ReFocus-Conf/519
Publisher: LLC Ilm-fan va innovatsiyalar akademiyasi
Added to repository: 2026-08-07